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联系电话：+86-769-23191069
+86-769-22406633
图文传真：+86-769-22805958
售后服务：13829231060
邮 编：523077
网 址：www.designtech.cn
邮 箱:dgdexin@designtech.cn
地 址:广东省东莞市南城区莞太大
道255号福地5栋C7-C9 |
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微波等离子CVD系统
Microwave plasma CVD systems
Plasma Source Model |
AX5000 |
AX5400 |
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Integrated Model |
AX5200 |
AX5250 |
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Full Auto Model |
AX6300 |
AX6350 |
AX6500X |
AX6600 |
Reactor Type |
Plasma Immersion |
Plasma Immersion |
Plasma Immersion |
Plasma Immersion |
Use |
R&D |
R&D |
R&D and Production |
Production |
Stage Heated or Cooled |
Heated |
Cooled |
Cooled |
Cooled |
Microwave Power |
1.5kW |
5kW |
6KW / 8kW |
60 - 100kW |
Microwave Frequency |
2.45GHz |
2.45GHz |
2.45GHz |
915MHz |
Typical Diameter |
50mm |
50mm |
64-100mm |
200mm |
Max Diameter |
100mm |
100mm |
125mm |
300mm |
Typical Growth Rate |
0.1-0.5µm/hr |
Up to 7µm/hr |
Up to 7µm/hr |
Up to 15µm/hr |
Typical Mass Rate |
1-4mg/hr |
60mg/hr |
90mg/hr |
1g/hr |
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